Beneq Prodigy™ is the ideal manufacturing solution for VCSEL, LED and MEMS manufacturers and foundries looking to enhance the device performance and reliability through an affordable stand-alone ALD batch tool. Beneq Prodigy provides best-of-breed passivation and/or encapsulation films across multiple wafer types and sizes.   

Value

High end technology for a lower price. Prodigy offers a unique breakthrough in economy, capacity and reliability to the compound semiconductor and MEMS manufacturing market. 

Simplicity

More time to think about solutions. Prodigy offers pure simplicity through automated loading with horizontal wafer handling and straight-forward maintenance and serviceability with easy side access.  

Innovation

Defining new standards. This tool sets a completely new standard for affordable, high-volume manufacturing of compound semiconductors and MEMS devices with ALD. We use simple automation and reliable reactor design gained at Beneq over 15 years to deliver proven results for high-end application areas.  

FAB-Ready

Beneq Prodigy is cleanroom compatible with SECS/GEM communication capabilities and is compliant with the highest SEMI S2 standards. 

Tech Specifications Prodigy

Product Transform® Transform ® 300 Prodigy
Dimensions 3000 x 3000 x 2250 mm 4400 x 4800 x 2250 mm 3500 x 2500 mm
Max Batch Load 200 mm x 25 wafers 300 mm x 25 wafers 150 mm x 50 wafers, 100 mm x 75 wafers
VCE Loadlocks 2 EFEM 1
Integration Cluster, up to 3 ALD modules & 1 pre-heater SECS/GEM Standalone system
Ozone Process Capability Optional Optional Optional
Wafer Pre-Heating Yes Yes Yes
Wafer Cooling Built-in Built-in No
Temperature Range 25 – 420 ℃ 25 – 420 ℃ 25 – 420 ℃
Plasma Gas Lines 2 + 2 optional 3+1 optional 0
Transfer Module Type Mx600 M2C5 Automatic Loader
Wafer Throughput (Al2O3 @ 200 C, 50 nm) 40 wafers/hour – 3 PM 12 wafers/hour – 1 PM >14 wafers/hour
Wafer Throughput (HfO2 @ 250 C, 20 nm) 28 wafers/hour – 3 PM N/A N/A
Integration SECS/GEM SECS/GEM SECS/GEM
Safety and Ergonomics SEMI S2 and S8 SEMI S2 and S8 SEMI S2
Cleanroom collaboration stock

Looking to adopt ALD in your product design and production?

Learn more about Beneq’s Development Service. Visit our FAQ page for expert guidance.

Learn more

Speak to an expert about Prodigy

If you are an existing customer seeking support, upgrades or spare parts, please use our Support form.